Chapter 1 quick start, 1 introduction, Chapter 1 – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
Chapter 1
Quick Start
1.1 Introduction
INFICON SQC-310 series instruments are multi-channel QCM-based deposition
controllers. They provide a unique combination of accuracy and powerful features
in a compact, low cost instrument.
Figure 1-1 SQC-310C
The standard SQC-310 measures up to two quartz crystal sensors, and controls up
to two evaporation sources. Eight process control relays and eight digital inputs are
included to support a broad range of external devices. The number of sensors,
outputs, and digital I/O can be doubled with an optional expansion card. The
SQC-310C co-deposition instrument allows simultaneous deposition of up to four
materials. RS-232 and USB communications are standard, with Ethernet optional.
NOTE: Both the SQC-310 and SQC-310C are referred to as the SQC-310 in this
manual. If there is a reason to distinguish between the two models, the
SQC-310 or SQC-310C model number will be called out.
This chapter will aid you in the initial setup and operation of your system. Please
review the entire manual for detailed operational, programming, and safety
information.
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