9 get/set sensor, source, relay parameters – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
Parameters:
1
Turn Relay: On (locks relay for remote use only)
2
Turn Relay: Off (locks relay for remote use only)
3
Unlock Relay (Releases the Relay back to the Instrument)
Format: . . . . . . . . GE[Relay#] [Parameter1]
Example: . . . . . . GE1 1
Returns: A
5.3.9 Get/Set Sensor, Source, Relay Parameters
Command: . . . . . H (obsolete)
Description: . . . . Gets/Sets the logical function of each of the 16 relays.
Parameters:
1
Source 1 Shutter
21
Max. Power
2
Source 2 Shutter
22
Stopped
3
Source 3 Shutter
23
Time Setpoint
4
Source 4 Shutter
24
Thick Limit
5-8
Sensor 1-4 Shutter
25
Final Thickness
9-12
Sensor 1-4 Fail
26
Dual Xtal 1/2 Shutter
13
All Crystals Good
27
Dual Xtal 3/4 Shutter
14
All Crystals Bad
28-35
Out1 Pocket 1-8
15
Process Hold
36-43
Out1 Pocket 1-8
16
Deposit Phase
44-51
Out1 Pocket 1-8
17
PreCond Phase
52-59
Out1 Pocket 1-8
18
SoakHold Phase
19
Process Active
20
Manual Mode
Example: . . . . . . To Get Relay 1 and Relay 2 functions, send: H? 1 2
The return for Source 1 Shutter and Sensor 1 Shutter would be:
1,1 2,5
To Set the same parameters you would send: H1 1,1 2,5
Command: . . . . . HA
Description: . . . . Gets/Sets the parameters of each of the 2 or 4 sensors.
Parameters:
1
Crystal Tooling
6
Drive Type
2
Number of Positions
7
Feedback Type
3
Shutter
8
Indexer Delay (sec.)
4
Shutter Delay (ms)
9
Current Crystal Position
5
Control Type