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INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

Initialized Layer

Manual Start Layer

Rotate Crystal

Rotate Pocket

Preconditioning

Soak Hold

Shutter Delay

Deposit

Timed Power Recovery

Crystal Switch

Next Crystal

Feed Ramp

Idle Ramp

Start Next Layer

Crystal Fail

Stop Layer

Snsor Feedback Timeout

Sorce Feedback Timeout

Sensor Feedback Error

Source Feedback Error

Invalid Crystal Position

Invalid Pocket Position

Internal Events: Allows the user to select an internal event as a condition.
Available events include:

Simulate

Manual Mode

Interlock

Last Layer

Process Hold

Process Active

Process Stopped

Shutter Delay Error