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3 get/set system parameters, Section 5.3.3, get/set system, For p – INFICON SQC-310 Thin Film Deposition Controller User Manual

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SQC-310 Operating Manual

5.3.3 Get/Set System Parameters

Command: . . . . . B

Description: . . . . Gets/Sets the system parameters screen values. The format is

similar to Get/Set Film Parameters. See the examples below.

Parameters:

1

Period

11

Scale 4 (obsolete)

2

System Tooling

12

Xtal Tool 3 (obsolete)

3

Xtal Tool 1 (obsolete)

13

Xtal Tool 4 (obsolete)

4

Xtal Tool 2 (obsolete)

14

Alarm Sounds

5

Simulate Mode

15

Alert Sounds

6

Min. Frequency

16

Attention Sounds

7

Max. Frequency

17

Rate Dev Graph Limit

8

Scale 1 (obsolete)

18

Password Enabled

9

Scale 2 (obsolete)

19

Password

10

Scale 3 (obsolete)

20

RateFilterAlphaValue

Example: . . . . . . To Get the Xtal Tool 1 and Xtal Tool 2, send: B? 3 4

The return string would be of the form: 3,100 4,100

To Set the parameters you would send: B 3,100 4,100

Command: . . . . . BA

Description: . . . . Switch the graphs/displays on the main screen.

Parameters:

1

Display Rate vs. Time Graph

2

Display Rate Deviation vs. Time Graph

3

Display Power vs. Time Graph

4

Display Large Format Screen

Format: . . . . . . . . BA [Parameter]

Example: . . . . . . BA 1

Returns: A

Command: . . . . . BB

Description: . . . . Turns the remote mode on or off. Remote mode ignores all local

user input such as button presses.

Parameters:

1

Turn Remote Mode: Off

2

Turn Remote Mode: On

Format: . . . . . . . . BB [Parameter]

Example: . . . . . . BB 1

Returns: A