INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 41)

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SQC-310 Operating Manual
Once the Xtal Tooling is set, set Film Tooling in the Film Menu to 100% unless you
are certain that another value is needed for a specific film.
Verify that the Density and Z-Factor values match those in the Materials
Parameters Appendix. If the material is not listed, check a materials handbook.
Density has a significant effect on rate/thickness calculations.
Z-Factor corrects for stresses as a crystal is coated. If readings are initially
accurate, but deteriorate as crystal life drops below 60-70%, you need to adjust the
Z-Factor or replace crystals more frequently. The relationship between Z-Factor
and Acoustic Impedance is discussed in
Appendix A, Material Table .
Poor Rate Stability
First, be sure that a stable rate can be achieved in Manual mode, as explained in
section 2.8 . Once a stable rate is achieved in Manual mode, follow the Loop Tuning
procedures.