4 defining a process – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
Figure 2-5 Configure Sensor Menu
Crystal Fail mode selects the action taken when a sensor crystal fails. Select Halt
to halt the process on failure. Select Halt Last if multiple sensors are used for this
film. Select Timed Power to enter Timed Power mode using the last good
rate/power measurements. Select Switch to Backup to switch to a backup crystal.
The next three parameters define which position of a multi-crystal sensor is used
as the primary, and which is the backup. The number of sensor positions displayed
is determined by the sensor configuration on the Sensors & Sources screen of the
System Menu.
2.4 Defining a Process
To define a process, press Next Menu until the Process Menu SoftKey is shown.
Press Process Menu. A list of 100 processes (or
define a new process, scroll to
added to the list of existing processes. Press Edit Name to change the process
name.
Press Select, then Edit to display the sequence of layers and films that comprise
the selected process. To add the first layer, press Insert New. Select a film from
the films screen and press Insert Normal. To add more layers, scroll to below the
last layer and press Insert New. Layers are always added above the selected
layer.
To insert a layer in a sequence of layers, scroll to below the desired location in the
layer sequence, and press Insert Normal. Select a film from the list and press
Insert Normal to insert the new layer above the selected layer. The selected layer
and subsequent layers will be shifted down.
HINT: When building a process it may be easiest to add a “dummy” last layer and
keep inserting above that layer. When the process is complete, delete the
“dummy” layer.