INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 84)

5 - 4
IP
N 07
4-
55
0-
P1
B
SQC-310 Operating Manual
A4: 1 Shutter Delay 5 Rate Sampling (0,1,2)
2 Capture 6 Sample Accuracy
3 Control Error (0,1,2) 7 Sample Hold
4 Control Percent 8 Sample Time
A5: 1 Snsr 1 Crystal Fail Mode 9 Snsr 3 Crystal Fail Mode
2 Snsr 1 Crystal Position 10 Snsr 3 Crystal Position
3 Snsr 1 Backup Sensor 11 Snsr 3 Backup Sensor
4 Snsr 1 BackupXtalPosition 12 Snsr 3 BackupXtalPosition
5 Snsr 2 Crystal Fail Mode 13 Snsr 4 Crystal Fail Mode
6 Snsr 2 Crystal Position 14 Snsr 4 Crystal Position
7 Snsr 2 Backup Sensor 15 Snsr 4 Backup Sensor
8 Snsr 2 BackupXtalPosition 16 Snsr 4 BackupXtalPosition
Example: . . . . . . To Get the PID parameters of Film 1, send: A2 1? 1 2 3
The return string would be of the form: 1,50 2,5 3,0
To Set the PID parameters of Film 1, send: A2 1 1,50 2,5 3,0
NOTE: Numeric film parameter values sent and received by
the SQC-310 are integers. To convert between the
integer value and the parameter’s actual value, you
must multiply or divide by the number of decimal digits
in the displayed parameter.
In the examples above, the P term is displayed as an integer
value, so no conversion is required. However, the I Term is
displayed with one decimal digit (i.e., 0.5). A Get response of 5
actually represents a parameter value of .5. Similarly, a Set
value of 5 for the I Term sets its value in the SQC-310 to .5.