Appendix b specifications, B.1 measurement, B.2 source – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 113: B.3 digital i/o, Appendix b
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SQC-310 Operating Manual
Appendix B
Specifications
B.1 Measurement
Number of Sensors . . . . . . . . . . . . . 2 (+2 optional)
Frequency Range. . . . . . . . . . . . . . . 4.0 MHz to 6.0 MHz
Frequency Accuracy. . . . . . . . . . . . . .001%
Frequency Resolution . . . . . . . . . . . .03 Hz @ 10 readings/s
Rate Accuracy . . . . . . . . . . . . . . . . . .5% typical
Rate Display Resolution . . . . . . . . . . .01 or .1 Å/s
Thickness Accuracy . . . . . . . . . . . . . .5% typical
Thickness Resolution . . . . . . . . . . . . .001 kÅ
Measurement Period . . . . . . . . . . . . .1 to 1 s
B.2 Source
Number of Sources . . . . . . . . . . . . . 2 (+2 optional)
Control Voltage . . . . . . . . . . . . . . . . . 0 to ±10 V into 2 k
load
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits
B.3 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 8 (+8 optional)
Functions . . . . . . . . . . . . . . . . . . User Selected (See Chapter 3)
Input Rating . . . . . . . . . . . . . . . . 5 V (dc), non-isolated
Relay Outputs
. . . . . . . . . . . . . . . . . . . .8 (+8 optional)
Functions . . . . . . . . . . . . . . . . . . User Selected (See Chapter 3)
Relay Rating . . . . . . . . . . . . . . . . 30V
rms
or 30 V (dc), 2 A maximum