INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 36)

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SQC-310 Operating Manual
NOTE: It is best (and safest!) to place the SQC-310 in Simulate mode when a
process is first run. If the bottom SoftKey does not show Start Simulate,
press System Menu and turn Simulate Mode ON.
Enough preliminaries, let’s start the process!
Press Start to start deposition. If the first layer Start mode was programmed as
Manual, you will need to press the Start Layer SoftKey now to start the layer.
Figure 2-13 Preconditioning
The process starts with the first layer preconditioning phase. When preconditioning
is complete, the deposition phase begins. The deposition phase ends when Final
Thickness is reached for the layer, then Feed and Idle phases run (if programmed).
If the second layer is Auto Start, its cycle begins immediately when the first layer is
complete. If the second Layer is Manual Start, or it’s the last layer in the process,
the process halts and waits for operator intervention.
While the process is running, a Stop Layer SoftKey is shown. Pressing Stop Layer
temporarily halts the current Layer.