INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 96)

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SQC-310 Operating Manual
Example: . . . . . . To Get Sensor 1 info, send: PA1
The return string is of the form:
status frequency life
where status 0=inactive,1=active
For example: 1 5950000.00 95.00
5.3.18 Get Output Deviation
Command: . . . . . Q
Description: . . . . Returns the % deviation of the requested output.
Parameters: . . . . Output Number
Example: . . . . . . To Get Output 1 deviation, send: Q1
The return string is of the form: 1.00
5.3.19 Get/Set Output Power
Command: . . . . . S
Description: . . . . Returns output power. Sets outputs to PID loop mode or manual
mode. In manual mode, also sets the output power. Power is
sent as an integer value.
Parameters: . . . . Output Number, Power
Example: . . . . . . To Get Output 2 power send: S? 2
To Set Output 2 to 50.0% of full scale send: S2 500
NOTE: This places other outputs in Manual mode at their
current power.
To set all outputs to PID loop control send: S0
5.3.20 Set Active Process
Command: . . . . . T
Description: . . . . Sets the currently selected process. If a process is running, it is
not changed and an E response status is returned.
Parameters: . . . . Process Number
Example: . . . . . . To set the process to Process 1 send: T1