INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 115)

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SQC-310 Operating Manual
B.7 Layer Parameters
NOTE: Layer is a Film, plus these values.
Initial Rate . . . . . . . . . . . . . . . . . . . . 0.0 to 99.9 Å/s
Final Thickness . . . . . . . . . . . . . . . . 0.0 to 99.999 kÅ
Time Setpoint . . . . . . . . . . . . . . . . . . 0 to 30000 s
Thickness Limit. . . . . . . . . . . . . . . . . 0.0 to 99.999 kÅ
Start Mode . . . . . . . . . . . . . . . . . . . . Auto/Manual
Output Select . . . . . . . . . . . . . . . . . . 1, 2, 3, 4
Max Power . . . . . . . . . . . . . . . . . . . . 0.0 to 100.0 %
Slew Rate . . . . . . . . . . . . . . . . . . . . . 0.0 to 100.0 %/s
Sensor Select (1 to 4). . . . . . . . . . . . On/Off
# Rate Ramps. . . . . . . . . . . . . . . . . . 2
Rate Ramp Start. . . . . . . . . . . . . . . . 0.0 to 99.999 kÅ
Rate Ramp Time . . . . . . . . . . . . . . . 0 to 1000 s
New Rate . . . . . . . . . . . . . . . . . . . . . 0.0 to 99.9 Å/s
B.8 Film Parameters
NOTE: Film is a Material, plus these values.
Material. . . . . . . . . . . . . . . . . . . . . . . 100 stored
Density . . . . . . . . . . . . . . . . . . . . . . . 0.40 to 99.99 gm/cm
3
Z-Factor . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.900
P Term . . . . . . . . . . . . . . . . . . . . . . . 1 to 9999
I Term . . . . . . . . . . . . . . . . . . . . . . . . 0 to 99.9 s
D Term . . . . . . . . . . . . . . . . . . . . . . . 0 to 99.9 s
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 400
Pocket . . . . . . . . . . . . . . . . . . . . . . . 1 to 8
Crystal Quality . . . . . . . . . . . . . . . . . Disabled to 30 %
Crystal Stability . . . . . . . . . . . . . . . . . Disabled to 5000 Hz
Crystal Fail Mode . . . . . . . . . . . . . . . Halt or Timed Power
Ramp1, Ramp2, Feed Ramp,
Feed, Idle Ramp Time . . . . . . . . . . . 0 to 30000 s