INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 114)

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SQC-310 Operating Manual
B.4 General Specifications
Mains Power Supply . . . . . . . . . . . . 100-120/200-240~, ±10% nominal 50/60 Hz,
auto detect
Power Consumption . . . . . . . . . . . . 25 W
Operating & Transportation . . . . . . . 0 C to 50C
Environment . . . . . . . . . . . . . . . . . . . 0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected against
harmful ingress of moisture)
Pollution Degree II
Installation (Overvoltage) Category II for
transient overvoltages
Storage Environment . . . . . . . . . .-40 C to 70C
Rack Dimensions (HxWxD) . . . . . . . 5.23 in x 8.4 in x 10.0 in
132.8 mm x 213.4 mm x 254.0 mm
Weight . . . . . . . . . . . . . . . . . . . . . . . 4 lbs. (1.8 kg)
B.5 Display
Graphs . . . . . . . . . . . . . . . . . . . . . . . Rate, Deviation, Power
Readouts . . . . . . . . . . . . . . . . . . . . . Thickness, Rate, Power
B.6 Process Parameters
NOTE: A Process is a sequence of layers.
# Processes . . . . . . . . . . . . . . . . . . . 100
# Films . . . . . . . . . . . . . . . . . . . . . . . 50
# Layers (total all processes) . . . . . . 1000