INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 92)

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SQC-310 Operating Manual
Format:. . . . . . . . HA[Sensor#]? [Parameter1] [Parameter2] …
Example: . . . . . . HA1? 2 5 9
Returns: !A2,4 5,3 9,1
Command: . . . . . HB
Description: . . . . Gets/Sets the parameters of each of the 2 or 4 sources.
Parameters: 1 Voltage Scale 6 Drive Type
2 Number of Positions 7 Feedback Type
3 Shutter 8 Indexer Delay (sec.)
4 Shutter Delay (ms) 9 Current Pocket Position
5 Control Type
Format:. . . . . . . . HB[Source#]? [Parameter1] [Parameter2] …
Example: . . . . . . HB1? 2 5 9
Returns: !A2,4 5,3 9,1
Command: . . . . . HC
Description: . . . . Gets the status flags for each of the 2 or 4 sensors.
Parameters: 1 Dual Crystal has Switched 6 Sensor is currently in use
2 Backup Crystal Switch has begun 7 Next Crystal Move Complete
3 Backup Crystal Switch is done 8 Sensor Initiated Time Power
4 Sensor is Disabled 9 Sensor Initiated Halt
5 Original Crystal has failed
Format:. . . . . . . . HC[Sensor#]? [Parameter1] [Parameter2] …
Example: . . . . . . HC1? 5 6
Returns: A5,1 6,0
Command: . . . . . HD
Description: . . . . Gets the status flags for each of the 2 or 4 sources.
Parameters: 1 Source is currently in use
Format:. . . . . . . . HD[Source#]? [Parameter1]
Example: . . . . . . HD1? 1
Returns: A1,1
Command: . . . . . HE*
Description: . . . . Gets/Sets the IO mappings of each of the 2 or 4 sensors.
Parameters: 1 Input Map* 2 Relay Map*
Format:. . . . . . . . HE[Sensor#]? [Parameter1] [Parameter2] …