5 installation, Caution, Warning - risk of electric shock – INFICON SQC-310 Thin Film Deposition Controller User Manual
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SQC-310 Operating Manual
1.5 Installation
CAUTION
Care should be exercised to route SQC-310 cables as far
as practical from other cables that carry high voltages or
generate noise. This includes other line voltage cables,
wires to heaters that are SCR-controlled, and cables to
source power supplies that may conduct high transient
currents during arc down conditions.
Table 1-4 Installation
Rack
Installation
The SQC-310 occupies a 5.25 in. high, half-rack space.. An
optional installation kit (P/N 782-900-007) is available to adapt to a
full rack (see
).
Power
Connection
The SQC-310 automatically detects main voltages of 100-120 and
200-240 V (ac), 50/60Hz.
WARNING - Risk Of Electric Shock
Verify that the power cable provided is
connected to a properly grounded mains
receptacle.
Sensor Input
Connections
Connect the BNC cables and oscillators from your vacuum
chamber feedthrough to the desired SQC-310 sensor inputs. See
the previous section for cabling details.
Source Output
Connections
Connect the BNC cables from the SQC-310 output connectors to
your evaporation supply control input. Consult your Power Supply
operator’s manual for control input wiring instructions.
Digital I/O
Connections
Refer to
for details on wiring digital I/O to the SQC-310
Relay I/O connectors.
Computer
Connection
If you want to collect data or program the SQC-310, attach a
straight-thru RS-232 cable from the RS-232 connector to your
computer’s serial port.
You can also communicate via USB using a standard USB cable. If
you ordered the Ethernet option, the USB connection is replaced
with an RJ-45 Ethernet connector.