INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 60)

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SQC-310 Operating Manual
Rate Sampling: Rate sampling can extend the life of crystals. With rate sampling,
the deposition rate is sampled for a period of time, then the sensor shutter is
closed. Power is then held at the same level as the final power setting during the
sample period.
 Continuous selects no sampling; the sensor shutter remains open during
deposition.
 Time based sampling opens the shutter for a fixed period of time, then closes
it for a fixed time.
 Accuracy based sampling opens and closes the shutter at the rate required to
maintain the desired accuracy during the hold phase.
3.10.3 Film Configure Sensor Menu
The Configure Sensors Menu, see Figure 3-14 , contains the settings used to
control crystal fail modes during error conditions.
Figure 3-14 Configure Sensors Menu
Crystal Fail Mode: The action that is executed if the sensor crystal fails.
Halt: The process will be halted in the event of a sensor failure.
Halt Last: The process will be halted if the last sensor of multiple assigned
sensors fails.
Timed Power: The current layer is completed based on the last power and rate
readings.
Switch to Backup: The sensor is switched to the backup sensor (see below)
in the event of a sensor failure.