INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 48)

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SQC-310 Operating Manual
Film Tooling: Compensates for sensor sensitivity to the selected material. Use
Xtal Tooling in the System Parameters menu to compensate for each sensor
individually.
Rate Filter Alpha: Selects the amount of filtering used to display rate data. An
Alpha of 1 is no filtering; Alpha of .1 is heavy filtering.
Ramp 1: During the deposition of a layer, it may be desirable to change the
deposition rate. For example, you may want to deposit slowly at first, then increase
the rate once an initial thickness is reached. Enabling rate ramps provides that
capability. Once enabled, these parameters are added to the list.
Start Thickness: The deposited thickness at which the new rate will begin.
Ramp Time: Time allowed for the rate to change from initial rate to new rate.
New Rate: The rate of deposition, which is reached at the end of Ramp 1.
Ramp 2 / Ramp3: Three rate ramps are available for each layer. Ramps 2 and 3
both have Start Thickness, Ramp Time, and New Rate parameters similar to those
described above for Ramp 1. The start thickness for Ramp 2 should be greater than
the start thickness for Ramp 1. Likewise, the start thickness for Ramp 3 should be
greater than the start thickness for Ramp 2.
3.6 Process Menus
There are several tiers of Process Menus. The first menu (shown in Figure 3-3 )
selects the current process. The current process is the process that is ready to run,
and also the process that is selected for editing.
Figure 3-3 Process Select Menu