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B - 4 – INFICON SQC-310 Thin Film Deposition Controller User Manual

Page 116

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B - 4

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SQC-310 Operating Manual

Soak1, Soak2, Feed, Idle Power . . . 0.0 to 100.0 %

Shutter Delay Time. . . . . . . . . . . . . . 0 to 200 s

Shutter Delay Error . . . . . . . . . . . . . 0.0 to 30.0 %

Control Error. . . . . . . . . . . . . . . . Ignore/Stop/Hold

Control Error Setting. . . . . . . . . . 0 to 30.0 %

Rate Sampling . . . . . . . . . . . . . . . . . Continuous/Time/Accuracy

Sample Time . . . . . . . . . . . . . . . 10.0 to 999.0 s

Hold Time . . . . . . . . . . . . . . . . . . 10.0 to 999.0 s