INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 89)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-11
5.9.1.20 XTAL MRGN SWITCH
This message indicates the primary crystal is marginal and the sensor input has
been switched to the backup crystal. In addition, the Attention warning sounds.
Press any key to clear the sound.
5.9.1.21 RATE DEV. ATTEN
The deposition rate deviation error is greater than the value set in the Rate
Deviation Attention parameter.
5.9.1.22 MAXIMUM POWER
The output power is being limited by the value set in the Maximum Power
parameter.
5.9.1.23 MINIMUM POWER
The output power is at or below the minimum power set by the Minimum Power
parameter.
5.9.1.24 CHANGE POCKET...
Prompts the operator to switch the source pocket to the correct position. The
process will be on hold until the Start key is pressed. There is no message if the
Control parameter is set to Auto (Source Setup Menu).
5.9.1.25 CHANGE CRYSTAL...
Prompts the operator to switch the sensor to the correct crystal position. The
process will be on hold until the Start key is pressed. There is no message if the
Control parameter is set to Auto (Sensor Setup Menu).
5.9.1.26 ATTENTION ACTION
This message indicates the Alert sound was initiated by an internal action.
5.9.1.27 PRESS START TO RESUME PROCESS
This message comes up when the controller is aborted during a process. After the
abort condition is removed, the operator may press the Start key to resume the
process. To cancel from resuming the process, press Reset key.