INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 83)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-5
5.6.3 I/O STATUS SCREEN
Figure 5-9 I/O Status Screen
The I/O Status screen indicates the state of all the MDC-260's inputs and outputs.
Please note that you can use the arrow keys to scroll up and down the I/O listing.
5.6.4 ACTIVE LAYER PARAMETER UPDATE SCREEN
Figure 5-10 Active Layer Parameter Update Screen
The Active Layer Parameter Update screen displays a set of parameters of the
current active layer as shown in Figure 5-10. It allows the user to quickly change
these values, if needed, to fine-tune the run, without having to go into the Edit
Material Definition screen. To change a value, use the arrow keys to move the
cursor to highlight it, punch in the new value and press Enter. Note that values
changed in this screen will be written back to the material definition. Note that
this screen is only available during a process.
5.6.5 POSITION CONTROL SCREEN
Figure 5-11 Position Control Screen
Sample Cr Process Ready
Input State Output State
01 Source1 BCD 0 F Source1 BCD 0 F
02 Source1 BCD 1 T Source1 BCD 1 T
03 F Source1 Shutter F
04 F F
05 F F
06 F F
Sample Cr Predeposit Hold
Active Layer Parameter Update
Sensor
1 Soak Pwr 25.0
Crystal 01 Predep. Pwr 32.0
Thickness 1.500 Max Pwr 55.0
Rate #1 010.0 Prop. Gain 1000
Rate #2 000.0 Int. Time 99.9
Rate #3 000.0 Deriv. Time 00.0
Sample Cr Process Ready
Position Control
Command Actual Health
Source 1 Pocket: CM 01 N/A
Source 2 Pocket: -- N/A
Sensor 1 Crystal: -- 99%
Sensor 2 Crystal: -- 00%