INFICON MDC-260 Thin Film Deposition Controller User Manual
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MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP
4-39
appropriate output. The Inline drive type informs the controller that continuous
travel in one direction is not possible. Therefore to get from position 6 to 1, the
direction must be down through 5, 4, etc. until 1 is reached.
The controller creates one or more of the following outputs depending on the
type:
Drive Up
Drive Down
Step
6. Feedback Type (Individual, BCD, Single Home, In Position, No Feedback)
This parameter defines the type of feedback for a multiple pocket source. The
three feedback types available are as follows:
Individual - Individual position feedback. This feedback type uses one input
for each pocket position in the source. All inputs are normally false (open
circuit) unless the respective pocket is in position then that input is true
(closed to ground). For example, a six-pocket source would use six inputs. If
pocket two was in position then all the inputs would be false except the input
connected to feedback position number two.
BCD - Binary Coded Decimal position feedback. This feedback type
uses binary coding to indicate the pocket position. Inputs are numbered
most significant bit first. For example, an eight-pocket source would use
three inputs. With pocket one in position, all inputs would be false. With
pocket four in position, inputs one and two would be true and input three
would be false.
Pocket
Number
Input
BCD2
Input
BCD1
Input
BCD0
1 OPEN
OPEN
OPEN
2 OPEN
OPEN
GND
3 OPEN
GND
OPEN
4 OPEN
GND
GND
5 GND
OPEN
OPEN
6 GND
OPEN
GND
7 GND
GND
OPEN
8 GND
GND
GND
Table 4-2 Table of Input States for BCD Feedback Type
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when pocket one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired pocket is in position.
NO FEEDBACK - No pocket position feedback is used.