INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 12)

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2.2.11 ALPHANUMERIC KEYPAD................................................................................. 2-4
3. BENCH CHECKOUT & INSPECTION......................................................................... 3-1
3.1 INSPECTION ................................................................................................................. 3-1
3.2 COLD POWER UP......................................................................................................... 3-1
3.3 WARM POWER UP....................................................................................................... 3-1
3.4 SAMPLE PROGRAM .................................................................................................... 3-1
3.4.1 MATERIAL #1 PARAMETERS .................................................................................. 3-2
3.4.2 MATERIAL #2 PARAMETERS .................................................................................. 3-3
3.4.3 PROCESS PARAMETERS ......................................................................................... 3-4
3.5 SIMULATE OPERATION............................................................................................. 3-4
3.6 MANUAL OPERATION ............................................................................................... 3-4
4. PROGRAMMING AND CONTROLLER SETUP ........................................................ 4-1
4.1 GENERAL...................................................................................................................... 4-1
4.1.1 NAVIGATING THE MENU STRUCTURE ................................................................ 4-1
4.1.2 ENTERING ALPHA CHARACTERS.......................................................................... 4-1
4.1.3 ENTERING TIME PARAMETERS............................................................................. 4-2
4.1.4 COPYING AND DELETING ..................................................................................... 4-2
4.1.5 PASSWORD PROTECTION ...................................................................................... 4-2
4.1.5.1 VIEW/RUN PROCESS PASSWORD ........................................................................... 4-2
4.1.5.2 EDIT PROCESS PASSWORD ...................................................................................... 4-3
4.1.5.3 EDIT MATERIAL PASSWORD ................................................................................... 4-3
4.1.6 ADJUSTING LCD DISPLAY CONTRAST................................................................. 4-3
4.1.7 SPECIAL FUNCTION KEY ....................................................................................... 4-3
4.2 GETTING STARTED .................................................................................................... 4-3
4.2.1 UTILITY SETUP ........................................................................................................ 4-4
4.2.2 SOURCE SETUP ....................................................................................................... 4-4
4.2.3 SENSOR SETUP ........................................................................................................ 4-7
4.2.3.1 EXAMPLE USING THE RSH-600 SIX CRYSTAL SENSOR HEAD ........................ 4-9
4.2.4 INPUT, OUTPUT AND ACTION SETUP.................................................................. 4-9
4.2.5 DISPLAY SETUP ......................................................................................................4-10
4.2.6 MATERIAL SETUP...................................................................................................4-11
4.2.6.1 POWER RAMPS.......................................................................................................... 4-11
4.2.6.2 AUTOMATIC CRYSTAL SWITCHING .................................................................... 4-12
4.2.6.3 RATE ESTABLISH ..................................................................................................... 4-12
4.2.6.4 RATE RAMPS ............................................................................................................. 4-12
4.2.6.5 RATE SAMPLE MODE .............................................................................................. 4-12
4.2.6.6 RATE DEVIATION ACTIONS................................................................................... 4-13
4.2.7 PROCESS SETUP.....................................................................................................4-13
4.2.8 STARTING A NEW PROCESS..................................................................................4-13
4.2.9 RESUMING A PROCESS FROM ABORT OR HALT ...............................................4-13
4.3 DETAILED PROGRAMMING ....................................................................................4-14
4.3.1 VIEW/EDIT PROCESS .............................................................................................4-14
4.3.1.1 DEFINE A PROCESS.................................................................................................. 4-14
4.3.2 VIEW/EDIT MATERIAL ...........................................................................................4-16
4.3.2.1 DEFINE A MATERIAL............................................................................................... 4-16
4.3.3 SYSTEM SETUP .......................................................................................................4-24
4.3.3.1 EDIT DISPLAY SETUP .............................................................................................. 4-24
4.3.3.2 PROGRAM INPUTS ................................................................................................... 4-26
4.3.3.3 PROGRAM OUTPUTS................................................................................................ 4-27
4.3.3.4 PROGRAM ACTIONS ................................................................................................ 4-32
4.3.3.5 EDIT SENSOR SETUP................................................................................................ 4-34
4.3.3.6 EDIT SOURCE SETUP ............................................................................................... 4-37
4.3.3.7 EDIT UTILITY SETUP ............................................................................................... 4-40
5. OPERATING THE MDC-260.......................................................................................... 5-1
5.1 SIGN-ON SCREEN........................................................................................................ 5-1
5.2 STARTING A NEW PROCESS ..................................................................................... 5-1
5.3 STARTING A NEW LAYER ......................................................................................... 5-2