INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 13)

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5.4 RESUMING AN ABORTED OR HALTED PROCESS................................................. 5-2
5.5 GR AP H DISPLAYS ........................................................................................................ 5-2
5.6 STATUS DISPLAYS...................................................................................................... 5-3
5.6.1 MAIN RUN SCREEN ................................................................................................. 5-4
5.6.2 SOURCE-SENSOR STATUS SCREEN....................................................................... 5-4
5.6.3 I/O STATUS SCREEN ................................................................................................ 5-5
5.6.4 ACTIVE LAYER PARAMETER UPDATE SCREEN .................................................. 5-5
5.6.5 POSITION CONTROL SCREEN................................................................................ 5-5
5.7 MODES .......................................................................................................................... 5-6
5.7.1 PROCESS READY...................................................................................................... 5-6
5.7.2 ABORT ....................................................................................................................... 5-6
5.7.3 HALT (SOFT ABORT) ............................................................................................... 5-6
5.7.4 IN PROCESS.............................................................................................................. 5-6
5.7.5 NOT SAMPLING........................................................................................................ 5-7
5.7.6 PROCESS COMPLETE ............................................................................................. 5-7
5.7.7 MANUAL.................................................................................................................... 5-7
5.7.8 SIMULATE................................................................................................................. 5-7
5.8 STATES.......................................................................................................................... 5-7
5.9 TROUBLE, ERROR AND WARNING MESSAGES .................................................... 5-7
5.9.1 DESCRIPTION .......................................................................................................... 5-8
5.9.1.1 MIN RATE&MAX POWER.......................................................................................... 5-8
5.9.1.2 MAX RATE&MIN POWER.......................................................................................... 5-9
5.9.1.3 SYSTEM SETUP MEMORY CORRUPTED................................................................ 5-9
5.9.1.4 PROCESS MEMORY CORRUPTED ........................................................................... 5-9
5.9.1.5 MATERIAL MEMORY CORRUPTED ........................................................................ 5-9
5.9.1.6 RATE EST. ERROR ...................................................................................................... 5-9
5.9.1.7 CRYSTAL FAILURE .................................................................................................... 5-9
5.9.1.8 SOURCE FAULT .......................................................................................................... 5-9
5.9.1.9 SENSOR FAULT........................................................................................................... 5-9
5.9.1.10 NO SENSORS ENABLED .......................................................................................... 5-10
5.9.1.11 TIME POWER ............................................................................................................. 5-10
5.9.1.12 RATE DEV. ALARM .................................................................................................. 5-10
5.9.1.13 ALARM ACTION ....................................................................................................... 5-10
5.9.1.14 CRYSTAL MARGINAL ............................................................................................. 5-10
5.9.1.15 RATE DEV. ALERT ................................................................................................... 5-10
5.9.1.16 MAX POWER ALERT................................................................................................ 5-10
5.9.1.17 MIN POWER ALERT ................................................................................................. 5-10
5.9.1.18 ALERT ACTION ......................................................................................................... 5-10
5.9.1.19 XTAL FAIL SWITCH ................................................................................................. 5-10
5.9.1.20 XTAL MRGN SWITCH .............................................................................................. 5-11
5.9.1.21 RATE DEV. ATTEN ................................................................................................... 5-11
5.9.1.22 MAXIMUM POWER .................................................................................................. 5-11
5.9.1.23 MINIMUM POWER .................................................................................................... 5-11
5.9.1.24 CHANGE POCKET..................................................................................................... 5-11
5.9.1.25 CHANGE CRYSTAL... ............................................................................................... 5-11
5.9.1.26 ATTENTION ACTION ............................................................................................... 5-11
5.9.1.27 PRESS START TO RESUME PROCESS ................................................................... 5-11
6. TUNING THE MDC-260 CONTROL LOOP................................................................. 6-1
6.1 CONTROL LOOP BASICS............................................................................................ 6-1
6.2 C ONTROL L OOPS A PPLIED TO V ACUUM D EPOSITION ....................................................... 6-2
6.3 E STABLISHING MDC-260 C ONTROL L OOP P ARAMETERS ................................................ 6-3
7. INPUT/OUTPUT CHARACTERISTICS........................................................................ 7-1
7.1 SOURCE CONTROL VOLTAGE OUTPUT ................................................................. 7-1
7.2 SENSOR INPUT............................................................................................................. 7-1
7.3 DISCRETE OUTPUTS................................................................................................... 7-1
7.4 DISCRETE INPUTS....................................................................................................... 7-1
8. CONTROLLER INSTALLATION ................................................................................. 8-1