INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 50)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-14
Soak or Rise to Predeposit power states. Once in deposit, the thickness will
continue from the last value prior to the abort.
4.3 DETAILED PROGRAMMING
This section covers all of the MDC-260 programming in detail.
4.3.1 VIEW/EDIT PROCESS
Selecting View/Edit Process from the Main Menu will present the Select Process
screen to delete, copy, view or edit any one of up to 10 processes.
To select a process for viewing and editing, move the cursor onto the desired
process using the Up-arrow and Down-arrow keys, then press the Enter key.
Figure 4-2 Select Process Screen
4.3.1.1 DEFINE A PROCESS
Figure 4-3 Define Process Screen
Selecting a process will bring up the Define Process screen as shown in Figure
4-3. In this screen you enter all of the parameters that define a process. A
process consists of a twelve-character name, two levels of passwords and finally a
sequence of layers that makeup the process. Each layer consists of a material and
the desired thickness for the layer. A process can have from 1 to 250 layers as
long as the total number of layers in all the processes is not greater than 250. The
following list describes all of the process parameters:
Process Name (twelve character alphanumeric field)
Select Process: 01 Cr ----------
02 Au
03
04
05
1 - Copy
06
0 - Delete 07
- View/Edit 08
↓
Process Name Layer# Thickness Material
Sample ------ 001 0.500 Cr
View/Run 0000 002 1.350 Au
Edit 0000 003 0.000 End Layer
004 0.000 End Layer
005 0.000 End Layer
006 0.000 End Layer
007 0.000 End Layer
View or Run Password
Edit Password