INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 133)

MDC-260 DEPOSITION CONTROLLER
THEORY OF OPERATION 10-9
Table 10-1 Material Density and Acoustic Impedance Value
Material Symbol Density
(mg/cm 2 )
Impedance
(10 5 gm/cm 2 sec)
Aluminum Al 2.70 8.17
Aluminum Antimonide AlSb 4.36 *
Aluminum Carbide Al
4
C
3
2.36 *
Aluminum Fluoride AlF
3
3.07 *
Aluminum Nitride AlN 3.26 *
Aluminum Oxide Al
2
O
3
3.97 26.28
Antimony Sb 6.62 11.49
Arsenic As 5.73 9.14
Arsenic Selenide As
2
Se
3
4.75 *
Barium Ba 3.5 4.20
Barium Fluoride BaF
2
4.87 11.13
Barium Nitrate BaN
2
O
6
3.24 7.00
Barium Oxide BaO 5.72 *
Beryllium Be 1.85 16.26
Beryllium Fluoride BeF
2
1.99 *
Beryllium Oxide BeO 3.01 *
Bismuth Bi 9.8 11.18
Bismuth Fluoride BiF
3
5.32 *
Bismuth Oxide Bi
2
O
3
8.90 *
Bismuth Selenide Bi
2
Se
3
6.82 *
Bismuth Telluride Bi
2
Te
3
7.70 *
Boron B 2.54 22.70
Boron Carbide B
4
C 2.37 *
Boron Nitride BN 1.86 *
Boron Oxide B
2
O
3
1.82 *
Cadmium Cd 8.64 12.95
Cadmium Fluoride CdF
2
6.64 *
Cadmium Oxide CdO 8.15 *
Cadmium Selenide CdSe 5.81 *
Cadmium Sulfide CdS 4.83 8.66
Cadmium Telluride CdTe 5.85 9.01
Calcium Ca 1.55 3.37
Calcium Fluoride CaF
2
3.18 11.39
Calcium Sulfate CaSO
4
2.96 8.87
Calcium Titanate CaTiO
3
4.10 *
Carbon (Diamond) C 3.52 40.14
Carbon (Graphite) C 2.25 2.71
Cerium Ce 6.78 *
Cesium Cs 1.87 *
Cesium Chloride CsCl 3.99 6.31
Cesium Sulfate Cs
2
SO
4
4.24 7.29