INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 134)

MDC-260 DEPOSITION CONTROLLER
THEORY OF OPERATION 10-10
Chromium Cr 7.20 28.95
Chromium Boride CrB 6.17 *
Chromium Carbide Cr
3
C
3
6.68 *
Cobalt Co 8.71 25.74
Cobalt Oxide CoO 6.44 21.43
Copper Cu 8.93 20.21
Copper (I) Sulfide (alpha) Cu
2
S 5.6 12.80
Copper (I) Sulfide (beta) Cu
2
S 5.8 13.18
Copper (II) Sulfide CuS 4.6 10.77
Copper Oxide Cu
2
O 6.00 *
Dysprosium Dy 8.54 14.72
Erbium Er 9.05 11.93
Erbium Oxide Er
2
O
3
8.64 *
Europium Eu 5.244 *
Gadolinium Gd 7.89 13.18
Gallium Ga 5.93 14.89
Gallium Antimonide GaSb 5.60 *
Gallium Arsenide GaAs 5.31 5.55
Gallium Nitride GaN 6.10 *
Germanium Ge 5.35 17.11
Germanium Nitride Ge
3
N
2
5.20 *
Germanium Oxide GeO
2
6.24 *
Germanium Telluride GeTe 6.20 *
Gold Au 19.30 23.18
Hafnium Hf 13.09 24.53
Hafnium Carbide HfC 12.20 *
Hafnium Nitride HfN 13.80 *
Hafnium Oxide HfO
2
9.68 *
Holnium Ho 8.8 15.2
Holnium Oxide Ho
2
O
3
8.41 *
Indium In 7.30 10.50
Indium Antimonide InSb 5.76 11.48
Indium Arsenide InAs 5.70 *
Indium Selenide In
2
Se
3
5.70 *
Indium Telluride In
2
Te
3
5.80 *
Iridium Ir 22.40 68.45
Iron Fe 7.86 25.30
Iron Sulfide FeS 4.84 *
Lanthanum La 6.17 9.59
Lead Pb 11.30 7.81
Lead Chloride PbCl
2
5.85 *
Lead Fluoride PbF
2
8.24 13.36
Lead Oxide PbO 9.53 *
Lead Selenide PbSe 8.10 *
Lead Sulfide PbS 7.50 15.60