INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 158)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-20
Response:
• In addition to the normal transmission receipt, the controller will respond
with several messages. The first message describes the general
information about Process #N, and has the following format:
Header Interface
Address
Inst.
Code
Length
(bytes)
Process #N
(one byte)
21 Data
Bytes
Checksum
Dec 255 254 1 10 22 N (data) (checksum)
Hex FF FE 01 0A 16 N (data) (checksum)
(data): The 21 data bytes representing the general information about Process #N.
(checksum): The checksum from the instruction code through the last data byte.
• After the general information message is transmitted, the controller will
send between one (1) and five (5) messages containing information about
each layer. Up to sixty (60) layers can be transmitted in each message.
Each of these messages has the following format:
Header Interface
Address
Inst.
Code
Length
(bytes)
Message
Number
Data Bytes Checksum
Dec 255 254 1 10 (length) (1...5) (data) (checksum)
Hex FF FE 01 0A (length) (1...5) (data) (checksum)
(length): The number of data bytes, including the Message Number, in this
message.
(data):
Layer data for up to 60 layers (4 bytes of data per layer).
(checksum): The checksum from the instruction code through the last data byte.
Code #11: Receive Process
Description: Instructs the controller to enter the incoming parameters of Process
#N into memory. Use the first table from Code #10 to construct a message to set
Process #N’s parameters to your desired settings.
Format/Example:
• To re-program Process #5 in the controller with custom parameters,
transmit:
Header Interface
Address
Inst.
Code
Length
(bytes)
Process #N
(one byte)
21 Data
Bytes
Checksum
Dec 255 254 1 11 22 5 (data) (checksum)
Hex FF FE 01 0B 16 05 (data) (checksum)
(data): The 21 data bytes representing the general information about Process #N.
(checksum): The checksum from the instruction code through the last data byte.