INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 58)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-22
The rate deviation attention parameter sets the allowable percent deviation from
the deposition rate. If the deposition rate deviates by more than this percentage
during the deposition, than a rate deviation attention message will be displayed in
the LCD display. The default setting of 00.0% disables this function.
33. Rate Dev. Alarm (00.0 to 99.9%)
This parameter sets the percent deviation from the deposition rate required to
trigger a rate deviation alarm. The default setting of 00.0% disables this function.
34. Rate Dev. Abort (00.0 to 99.9%)
The rate deviation abort parameter sets the allowable percent deviation from the
deposition rate. If the deposition rate deviates by more than this percentage and
the deposit power is at the maximum or minimum power alert level then the
process will be aborted. The default setting of 00.0% disables this function.
35. Sample Dwell % (000.0 to 100.0)
The Sample Dwell% parameter establishes the percentage of the Sample Time for
which the crystal is being sampled. Rate sampling is used for high deposition
thickness where crystal life is a problem. By sampling the rate periodically and
setting the power level to establish rate control, then closing the crystal shutter
and maintaining the power level, a large deposition thickness can be achieved
with one crystal. The primary sensor must have an individual shutter for the rate
sample feature. The default for this parameter is 100% which enables sampling at
all times.
36. Sample Period (0 to 9:59:59)
The Sample Period parameter defines the sample period. For example, a sample
time of 5 minutes and a dwell of 40% will result in the crystal being sampled for 2
minutes, then the crystal shutter is automatically closed for the remaining 3
minutes while the deposition power is kept constant. Please note, once the crystal
shutter has opened, there is a 5-second delay for crystal stabilization before
measuring. This parameter will not be displayed if the Sample Dwell %
parameter is set to 100%.
37. Crystal Fail (Halt, TimePwr, Switch)
This parameter defines the controller’s action in the event of a crystal failure. The
options are to halt the process, finish the current layer on time-power, or switch to
a backup crystal. Use the Enter key to cycle between the options.
38. Backup Sensor # (1 to 2)
This parameter is available when the Crystal Fail parameter (37, above) is set to
Switch. This parameter defines the backup sensor input for the backup crystal.
For a dual-crystal sensor head, this parameter should be set to “2” assuming
Sensor #1 is the primary crystal. However, for multiple-crystal sensor heads, this
parameter would be the same value as the Sensor # parameter (2, above) and the
Backup Crystal # parameter (39, below) would be set to “2”. This is because a
multiple-crystal sensor head uses one sensor input to measure any of its crystals
while a dual-crystal sensor head uses two sensor inputs to measure either crystal.