INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 67)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-31
• Time Setpoint
• Last Layer
• Crystal Failure
• Crystal Marginal
• Min Rate&Max Pwr
• Max Rate&Min Pwr
• Rate Dev. Alarm
• Rate Est. Error
• Source Fault
• Sensor Fault
• Rate Dev. Alert
• Max. Power Alert
• Min Power Alert
• Rate Dev. Atten.
• Max Power Atten.
• Min Power Atten.
Inputs - Input conditions are represented by the user defined programmable
inputs. A condition is either true or false depending on the state of the input.
Input conditions are used to indicate the state of something external to the MDC-
260. For example, you may want to program the MDC-260 to wait for a certain
pressure before starting a deposit. In this case you would create an input called
something like "At Pressure" and you would connect this input to a pressure
setpoint output of a vacuum gage. Next, you would create a Hold In State action
that would cause the MDC-260 to hold in a state prior to deposit until the "At
Pressure" input goes true.
Outputs - Output conditions are represented by the user defined programmable
outputs. A condition is either true or false depending on the state of the output's
total condition string.
Process - The process condition is evaluated true whenever the selected process is
the current process.
Material - The material condition is evaluated true whenever the selected
material is the current material.
Source (1-2) - The source condition is evaluated true whenever the current source
equals the specified source.
Pocket (1-16) - The pocket condition is evaluated true whenever the current
pocket equals the specified pocket.