INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 182
MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE
11-44
Byte # Bit #
Description
Length(bytes) Format
Units
1 0
Power
4 String
%
1
Thickness
5
String
KÅ
2
Deposition
rate
4
String
Å/sec
3
Crystal
health
2
String
%
4
Layer
number
3
String
None
5
Rate
deviation
4
String
%
6
Active
Process
2
String
7
Active
Material
2
String
2 0
Active
Source
1 String
1
Sensor #1 Rate
4
String
Å/sec
2
Sensor #2 Rate
4
String
Å/sec
3
Sensor #1 Thickness
5
String
KÅ
4
Sensor #2 Thickness
5
String
KÅ
5
Sensors #1-6 Crystal Position
6
String
6
Sensor #1 Strength
4
String
%
7
Sensor #2 Strength
4
String
%
3
0
Sources #1-2 Pocket Position
4
String
1
Layer Time To Go
7
String
h:mm:ss
2
State Time To Go
7
String
h:mm:ss
3
Elapsed Process Time
7
String
h:mm:ss
4
Elapsed Layer Time
7
String
h:mm:ss
5
Elapsed State Time
7
String
h:mm:ss
6
Sources #1-2 Status bits
2
7
Sensors #1-2 Status bits
2
4 0
Controller
State
1 Binary
1
Trouble
Flags
6
2
Controller
Status
2
3
Unused
0
5 0-7
Unused
0
Total: 5 Data Bytes
All string values are in ASCII format including decimal points and colons where
needed. See send run-time values (Code #30) above for details on the
source/sensors status, controller trouble and controller mode bits.