INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 71)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-35
Figure 4-17 Sensor Setup Screen
1. Number of crystals (1 to 16)
This parameter defines the number of crystals available for that sensor input. For
a single sensor head this would be set to one. For a dual sensor head with
separate oscillators and sensor connections, this would still be set to one because
there is only one crystal for each sensor input. For a multiple rotary type sensor
head, this parameter would be set to the number of crystals that the sensor will
hold.
2. Shutter Relay type (N.O., N.C., None, Dual)
This parameter defines the shutter relay type used to control the sensor shutter.
The following four relay types are available:
N.O. - Relay is normally open and closes to close shutter. For this type, a
“SensorN Shutter” output will be created to interface to the shutter actuator.
N.C. - Relay is normally closed and opens to close shutter. For this type, a
“SensorN Shutter” output will be created to interface to the shutter actuator.
None - No sensor shutter output is created.
Dual - Select this type for a dual sensor head. For this type, a “Dual Snsr1&2
Shtr” output will be created to interface to the shutter actuator.
3. Control (Manual, Direct, BCD, Indiv)
This parameter defines the type of crystal position control utilized.
Manual, as it implies, means not under control of the MDC-260. Under manual
control, the MDC-260 will stop the process upon the completion of the current
layer when the next layer requires a different crystal position. A message
prompting the operator with the number of the crystal required is displayed in the
LCD window. Once the crystal has been changed, the process is resumed by
pressing the Start key.
BCD and Indiv are used when control is through an external crystal rotation
controller which accepts Binary Coded Decimal inputs or Individual switch
closures to select the crystal. The controller creates the number of outputs
required to interface with the external controller and set the outputs as required to
signal a crystal selection. Note that the BCD value is offset by one to the crystal
number. For example, BCD value of 0 selects crystal 1. BCD value of 1 selects
crystal 2, and so on.
Sensor Setup
Number of Crystals 06
Sensor #1 Shutter Relay Type N.O.
Sensor #2 Control Direct
Drive
Up
Feedback Type No Feedback
Rotator Delay(sec) 00