INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 160)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-22
Format/Example:
• To instruct the controller to send the data for a Process #6, Layer #2,
transmit:
Header Interface
Address
Inst.
Code
Length
(bytes)
Process #N
(one byte)
Layer #Y
(one byte)
Checksum
Dec 255 254 1 13 2 6 2 232
Hex FF FE 01 0D 02 06 02 E8
Response:
• In addition to the normal transmission receipt, the controller will respond
with:
Header Int.
Addr.
Inst.
Code
Len. Process
#
Layer
#
4 Data
Bytes
Checksum
Dec 255 254 1 13 6 N Y (data) (checksum)
Hex FF FE 01 0D 06 N Y (data) (checksum)
(data): The requested layer information, as described in the table above (4 bytes).
(checksum): The checksum from the instruction code through the last data byte.
Code #14: Insert Process Layer
Description: Instructs the controller to insert the incoming layer parameters of
Process #N in front of Layer #Y, effectively adding the layer to the process. A
description of the insert process layer parameter list is as follows:
Parameter Name Length (bytes) Decimal Pt.
Position
Range Units
Layer #N Thickness 3 3 0...999900 Å
Layer #N Material # 1 * 1...8 None
Total: 4 Data Bytes per Layer