INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 11)

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Table of Contents
SAFETY PRECAUTION AND PREPARATION FOR USE................................................... IV
SAFETY TERMS AND SYMBOLS .............................................................................................V
1. GENERAL DESCRIPTION ............................................................................................. 1-1
1.1 PURPOSE ....................................................................................................................... 1-1
1.2 FEATURES .................................................................................................................... 1-1
1.2.1 AMPLE PROGRAM STORAGE................................................................................. 1-1
1.2.2 DYNAMIC MEASUREMENT UPDATE RATE .......................................................... 1-1
1.2.3 SUPERIOR COLOR GRAPHICS DISPLAY .............................................................. 1-1
1.2.4 PROGRAM SECURITY.............................................................................................. 1-1
1.2.5 DESIGNED FOR UNATTENDED OPERATION ...................................................... 1-1
1.2.6 FAIL SAFE ABORTS.................................................................................................. 1-2
1.2.7 ABORT STATUS RETENTION .................................................................................. 1-2
1.2.8 RUN COMPLETION ON CRYSTAL FAILURE ......................................................... 1-2
1.2.9 POWERFUL SYSTEM INTERFACE.......................................................................... 1-2
1.2.10 POWER SUPPLY NOISE TOLERANCE............................................................... 1-2
1.2.11 INTERNATIONAL STANDARD POWER CONNECTOR ..................................... 1-2
1.3 SPECIFICATIONS......................................................................................................... 1-3
1.3.1 MEASUREMENT ....................................................................................................... 1-3
1.3.2 DISPLAY .................................................................................................................... 1-3
1.3.3 COMMUNICATION................................................................................................... 1-3
1.3.4 PROGRAM STORAGE CAPACITY ........................................................................... 1-3
1.3.5 PROCESS PARAMETERS ......................................................................................... 1-3
1.3.6 MATERIAL PARAMETERS ....................................................................................... 1-4
1.3.7 INPUT/OUTPUT CAPABILITY ................................................................................. 1-5
1.3.8 SENSOR PARAMETERS............................................................................................ 1-5
1.3.9 SOURCE PARAMETERS........................................................................................... 1-6
1.3.10 UTILITY SETUP PARAMETER ............................................................................ 1-6
1.3.11 OTHERS ................................................................................................................ 1-6
1.4 ACCESSORIES .............................................................................................................. 1-7
2. FRONT PANEL DISPLAYS AND CONTROLS ........................................................... 2-1
2.1 G RAPHIC LCD DISPLAY................................................................................................ 2-1
2.1.1 PROGRAMMING SCREENS (MENUS) .................................................................... 2-1
2.1.2 RUN-TIME GRAPHS ................................................................................................. 2-1
2.1.3 STATUS SCREENS .................................................................................................... 2-1
2.1.3.1 MAIN RUN SCREEN.................................................................................................... 2-1
2.1.3.2 SOURCE/SENSOR STATUS SCREEN........................................................................ 2-1
2.1.3.3 INPUT/OUTPUT STATUS SCREEN ........................................................................... 2-1
2.1.3.4 ACTIVE LAYER PARAMETER UPDATE SCREEN ................................................. 2-2
2.1.3.5 POSITION CONTROL SCREEN.................................................................................. 2-2
2.2 OPERATING CONTROLS ............................................................................................ 2-2
2.2.1 STATUS KEY.............................................................................................................. 2-2
2.2.2 GRAPH KEY .............................................................................................................. 2-2
2.2.3 PROGRAM KEY......................................................................................................... 2-2
2.2.4 MANUAL KEY ........................................................................................................... 2-2
2.2.5 START KEY ................................................................................................................ 2-3
2.2.6 ABORT KEY ............................................................................................................... 2-3
2.2.7 RESET KEY................................................................................................................ 2-3
2.2.8 ZERO KEY ................................................................................................................. 2-3
2.2.9 SHUTTER KEY .......................................................................................................... 2-3
2.2.10 ARROW KEYS ....................................................................................................... 2-4