INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 17)

xii
Table of Figures
FIGURE 2-1 ARROW KEYS ....................................................................................................... 2-4
FIGURE 2-2 ALPHANUMERIC KEYPAD ................................................................................ 2-4
FIGURE 3-1 REMOTE POWER HANDSET ............................................................................. 3-5
FIGURE 4-1 THE MAIN MENU ................................................................................................ 4-1
FIGURE 4-2 SELECT PROCESS SCREEN ............................................................................. 4-14
FIGURE 4-3 DEFINE PROCESS SCREEN.............................................................................. 4-14
FIGURE 4-4 SELECT LAYER MATERIAL SCREEN............................................................. 4-16
FIGURE 4-5 SELECT MATERIAL SCREEN........................................................................... 4-16
FIGURE 4-6 DEFINE MATERIAL SCREEN ........................................................................... 4-16
FIGURE 4-7 SYSTEM SETUP MENU SCREEN .................................................................... 4-24
FIGURE 4-8 DISPLAY SETUP SCREEN ................................................................................ 4-24
FIGURE 4-9 PROGRAM INPUT SCREEN............................................................................... 4-27
FIGURE 4-10 SELECT OUTPUT SCREEN............................................................................. 4-28
FIGURE 4-11 PROGRAM OUTPUT SCREEN........................................................................ 4-28
FIGURE 4-12 OUTPUT CONDITIONS SELECTION SCREEN ............................................. 4-29
FIGURE 4-13 OUTPUT CONDITIONS SELECTION - SUB MENU...................................... 4-29
FIGURE 4-14 ACTION SELECTION SCREEN ....................................................................... 4-32
FIGURE 4-15 PROGRAM ACTION SCREEN ......................................................................... 4-33
FIGURE 4-16 SELECT DEFINED ACTION SCREEN ............................................................ 4-33
FIGURE 4-17 SENSOR SETUP SCREEN................................................................................ 4-35
FIGURE 4-18 SOURCE SETUP SCREEN ............................................................................... 4-37
FIGURE 4-19 UTILITY SETUP SCREEN ............................................................................... 4-40
FIGURE 5-1 SIGN-ON SCREEN................................................................................................ 5-1
FIGURE 5-2 RUN PROCESS SELECTION SCREEN............................................................... 5-1
FIGURE 5-3 RATE VS. TIME GRAPH...................................................................................... 5-2
FIGURE 5-4 RATE DEVIATION VS. TIME GRAPH............................................................... 5-3
FIGURE 5-5 THICKNESS VS. TIME GRAPH .......................................................................... 5-3
FIGURE 5-6 POWER VS. TIME GRAPH .................................................................................. 5-3
FIGURE 5-7 MAIN RUN SCREEN ............................................................................................. 5-4
FIGURE 5-8 SOURCE-SENSOR STATUS SCREEN................................................................. 5-4
FIGURE 5-9 I/O STATUS SCREEN............................................................................................ 5-5
FIGURE 5-10 ACTIVE LAYER PARAMETER UPDATE SCREEN ........................................ 5-5
FIGURE 5-11 POSITION CONTROL SCREEN ......................................................................... 5-5
FIGURE 5-12 TYPICAL PROCESS PROFILE ........................................................................ 5-12
FIGURE 7-1 PASSIVE INPUT BUFFER CIRCUIT .................................................................. 7-3
FIGURE 7-2 ACTIVE INPUT BUFFER CIRCUIT ..................................................................... 7-4
FIGURE 7-3 SENSOR INPUT BUFFER CIRCUIT .................................................................. 7-5
FIGURE 7-4 SOURCE OUTPUT DRIVER CIRCUIT ............................................................... 7-6
FIGURE 8-1 POWER ENTRY MODULE ................................................................................... 8-2
FIGURE 8-2 INPUT TYPE SELECTION SWITCHES ............................................................... 8-4
FIGURE 8-3 MDC-260 FRONT PANEL .................................................................................... 8-6
FIGURE 8-4 MDC-260 REAR PANEL ...................................................................................... 8-7
FIGURE 8-5 SOURCE SOCKET CONNECTOR PIN OUT ...................................................... 8-8
FIGURE 8-6 USB “B” TYPE SOCKET FRONT AND REAR PANEL CONNECTOR............. 8-8
FIGURE 8-7 D37P DISCRETE I/O PLUG CONNECTOR ......................................................... 8-9
FIGURE 8-8 FRONT PANEL MANUAL POWER CONNECTOR......................................... 8-10
FIGURE 8-9 MDC-260 TOP VIEW (COVER REMOVED) ..................................................... 8-11
FIGURE 8-10 RECOMMENDED GROUNDING METHOD ................................................... 8-12
FIGURE 9-1 REMOVING THE CRYSTAL RETAINER ........................................................... 9-5
FIGURE 9-2 INSTALLING THE SENSOR CRYSTAL ............................................................. 9-5
FIGURE 9-3 SO-100 SENSOR OSCILLATOR OUTLINE........................................................ 9-7
FIGURE 9-4 VPLO-6 SENSOR OSCILLATOR OUTLINE ....................................................... 9-8
FIGURE 9-5 IF-111 INSTRUMENTATION FEEDTHROUGH OUTLINE.............................. 9-9
FIGURE 9-6 SH-102 SENSOR HEAD OUTLINE ................................................................... 9-10
FIGURE 9-7 TYPICAL SYSTEM INSTALLATION............................................................... 9-11