INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 14)

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8.1 MOUNTING .................................................................................................................. 8-1
8.2 PROPER GROUNDING ................................................................................................ 8-1
8.3 EXTERNAL CONNECTIONS ...................................................................................... 8-1
8.3.1 POWER ENTRY MODULE ....................................................................................... 8-1
8.3.2 POWER CORD .......................................................................................................... 8-2
8.3.3 LINE VOLTAGE SELECTION AND FUSE REPLACEMENT .................................. 8-2
8.3.4 GROUND LUG.......................................................................................................... 8-3
8.3.5 REMOTE POWER HANDSET................................................................................... 8-3
8.3.6 SENSOR INTERFACE ............................................................................................... 8-3
8.3.7 SOURCE INTERFACE .............................................................................................. 8-3
8.3.8 USB COMMUNICATION .......................................................................................... 8-3
8.3.9 DISCRETE INPUT/OUTPUT .................................................................................... 8-3
8.3.9.1 CONFIGURING INPUT TYPE ..................................................................................... 8-4
8.4 P OWER S WITCH ............................................................................................................... 8-4
8.5 CONTROLLER COVER REMOVAL ........................................................................... 8-5
9. SYSTEM INSTALLATION ............................................................................................. 9-1
9.1 SENSOR HEAD DESCRIPTION .................................................................................. 9-1
9.2 SENSOR HEAD INSTALLATION ............................................................................... 9-1
9.3 SENSOR OSCILLATOR S .............................................................................................. 9-2
9.3.1 SO-100 OSCILLATOR ............................................................................................... 9-2
9.3.2 VPLO-6 OSCILLATOR.............................................................................................. 9-2
9.3.3 INSTALLATION......................................................................................................... 9-2
9.4 INSTRUMENTATION FEEDTHROUGH .................................................................... 9-2
9.5 SENSOR CRYSTAL REPLACEMENT ........................................................................ 9-3
9.5.1 CRYSTAL CARE AND HANDLING........................................................................... 9-3
9.5.2 CRYSTAL REPLACEMENT PROCEDURE .............................................................. 9-3
9.6 TYPICAL SYSTEM INSTALLATION ......................................................................... 9-6
10. THEORY OF OPERATION ......................................................................................10-1
10.1 BASIC MEASUREMENT ............................................................................................10-1
10.2 FILM THICKNESS CALCULATION ..........................................................................10-1
10.3 SENSOR CRYSTAL .....................................................................................................10-3
10.3.1 CRYSTAL HEALTH .............................................................................................10-3
10.3.2 CRYSTAL STABILITY ..........................................................................................10-4
10.3.3 TEMPERATURE COEFFICIENT OF THE CRYSTAL........................................10-4
10.3.4 CRYSTAL LIFE EXPECTANCY...........................................................................10-5
10.3.5 CRYSTAL ELECTRODE TYPE RECOMMENDATION ......................................10-6
10.4 RATE CALCULATION................................................................................................10-6
10.5 EMPIRICAL CALIBRATION ......................................................................................10-6
10.5.1 FILM DENSITY....................................................................................................10-7
10.5.2 TOOLING FACTOR.............................................................................................10-7
10.5.3 ACOUSTIC IMPEDANCE ...................................................................................10-8
11. COMPUTER INTERFACE........................................................................................11-1
11.1 GENERAL.....................................................................................................................11-1
11.2 H OST API F UNCTIONS ....................................................................................................11-2
SI_GetNumDevices..................................................................................................................11-2
SI_GetProductString ...............................................................................................................11-3
SI_Open...................................................................................................................................11-3
SI_Close ..................................................................................................................................11-4
SI_Read ...................................................................................................................................11-4
SI_Write...................................................................................................................................11-5
SI_SetTimeouts........................................................................................................................11-5
SI_GetTimeouts .......................................................................................................................11-6
SI_SetBaudRate.......................................................................................................................11-6
11.3 PROTOCOL ..................................................................................................................11-7
11.4 DATA TYPES ...............................................................................................................11-7