INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 135)

MDC-260 DEPOSITION CONTROLLER
THEORY OF OPERATION 10-11
Lead Telluride PbTe 8.16 13.56
Lithium Li 0.53 1.50
Lithium Bromide LiBr 3.47 7.18
Lithium Fluoride LiF 2.64 11.41
Lithium Niobate LiNbO
3
4.70 19.07
Magnesium Mg 1.74 5.48
Magnesium Aluminate MgAl
2
O
4
3.60 *
Magnesium Fluoride MgF
2
3.0 13.86
Magnesium Oxide MgO 3.58 21.48
Manganese Mn 7.20 23.42
Manganese (II) Sulfide MnS 3.99 9.39
Manganese Oxide MnO 5.39 18.91
Mercury Hg 13.46 11.93
Molybdenum Mo 10.20 34.36
Molybdenum Boride MoB
2
7.12 *
Molybdenum Carbide Mo
2
C 9.18 *
Nickel Ni 8.91 26.68
Nickel Oxide NiO 7.45 *
Niobium Nb 8.57 17.91
Niobium Boride NbB
2
6.97 *
Niobium Carbide NbC 7.82 *
Niobium Nitride NbN 8.40 *
Palladium Pd 12.00 24.73
Palladium Oxide PdO 8.31 *
Platinum Pt 21.40 36.04
Platinum Oxide PtO
2
10.20 *
Potassium K 0.86 0.87
Potassium Bromide KBr 2.75 4.67
Potassium Chloride KCl 1.98 4.31
Potassium Fluoride KF 2.48 *
Rhenium Re 21.04 58.87
Rhodium Rh 12.41 42.05
Rubidium Rb 1.53 3.48
Ruthenium Ru 12.36 48.51
Samarium Sm 7.54 9.92
Samarium Oxide Sm
2
O
3
7.43 *
Scandium Sc 3.0 9.70
Scandium Oxide Sc
2
O
3
3.86 *
Selenium Se 4.82 10.22
Silicon Si 2.32 12.40
Silicon (II) Oxide SiO 2.13 10.15
Silicon Dioxide (fused quartz) SiO
2
2.2 8.25
Silver Ag 10.50 16.69
Silver Bromide AgBr 6.47 7.48
Silver Chloride AgCl 5.56 6.69