INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 151)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-13
Code #02: Send Utility Parameters
Description: Instructs the controller to send the utility parameters to the host
computer. The following is a description of the data transmitted.
Prm# Parameter Name Length
(bytes)
Values
(decimal)
1 Pause on Layer Complete 1 4 = No, 5 = Yes
2 Negative Thickness Enable 1 6 = Enabled , 7 = Disabled
3 Thickness Graph Scale 1 8 = 2 Digit, 9 = 3 Digit
4 Sensor Status Select 1 10 = Thickness , 11 = Frequency
5 Time To Go Display 1 12 = Estimated Layer,
13 = Estimated State,
14 = Elapsed Process,
15 = Elapsed Layer,
16 = Elapsed State
6 Rate Graph 1 6 = Enabled, 7 = Disabled
7 Power Graph 1 6 = Enabled, 7 = Disabled
8 Thickness Graph 1 6 = Enabled, 7 = Disabled
9 Rate Deviation Graph 1 6 = Enabled , 7 = Disabled
10 Source/Sensor Status 1 6 = Enabled, 7 = Disabled
11 I/O Status 1 6 = Enabled, 7 = Disabled
12 Crystal Frequency 1 39 = 2.5 MHz, 40 = 3.0 MHz,
41 = 5.0 MHz, 42 = 6.0 MHz,
43 = 9.0 MHz, 44 = 10.0 MHz
13 Simulate Mode 1 45 = Off, 46 = On
14 USB Interface Address 1 01 , 02, 03 ... 32
15 Attention Volume 1 0, 1 , 2, 3 ... 10
16 Alert Volume 1 0, 1 , 2, 3 ... 10
17 Alarm Volume 1 0, 1 , 2, 3 ... 10
18 Starting Layer Number 1 0, 1, 2, 3 ... 10
Total: 18 Data Bytes
Format/Example:
• To instruct the controller to send the utility parameters, transmit:
Header Interface
Address
Instruction
Code
Length Checksum
Dec 255 254 1 2 0 253
Hex FF FE 01 02 00 FD