INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 34)

MDC-260 DEPOSITION CONTROLLER
BENCH CHECKOUT & INSPECTION 3-4
3.4.3 PROCESS PARAMETERS
Process Name Layer No. Thickness Material
Sample 1 0.400 KÅ Cr
2 1.050 KÅ Au
3.5 SIMULATE OPERATION
Testing the MDC-260 is best accomplished by checking its operation in the
Simulate Mode. This mode can be selected by entering the following
programming sequence: (Main Menu, Edit System Setup, Edit Utility Setup,
Simulate Mode ON). After enabling Simulate Mode, you may run a process in
Simulate Mode by pressing the Start key and selecting the process that you want
to run.
Simulate Mode is identical to the Normal Mode except that the sensor inputs are
simulated. For this reason, entry to the Simulate Mode will switch off the Crystal
Failure message if it is flashing. No other difference between the Simulate Mode
and the Normal Mode occurs until entry to the Deposit State.
3.6 MANUAL OPERATION
Manual Mode is selected by depressing the Manual key. The LED behind the key
will light up indicating the controller is in Manual Mode.
The Manual Mode is identical to the Normal Mode in all respects except that
source power for the active source is controlled only through the Remote Power
Handset.
The Remote Power Handset has three push buttons (see Figure 3-1). Without any
of the buttons depressed, the output power is maintained at its last value.
Depressing the “POWER (+)” button will increase the power, depressing the
“POWER (-)” button will decrease the power and depressing the “ABORT”
button will put the controller into the Abort Mode.
The “ABORT” button on the handset is active whether or not the MDC-260 is in
Manual Mode and therefore can be used as a remote “panic button”.
The minimum increment by which the power is increased or decreased is 0.1%.