INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 204

MDC-260 DEPOSITION CONTROLLER

INDEX

operating keys, 5-6

Abort, 2-3
Alphanumeric Keyboard, 2-4
Arrow, 2-4
Graph, 2-2
Manual, 2-2
Reset, 2-3
Shutter, 2-3
Start, 2-3
Status, 2-2
Zero, 2-3

optical monitor termination, 4-10
overshoot. See thickness overshoot

Parameter/Status display, 2-1, 2-2, 4-3,

4-21, 4-33, 5-6, 12-2

password protection

edit material password, 4-3
edit process password, 4-3
view/run process password, 4-2

pause on layer complete, 4-10, 4-23
PID. See control loop

parameters, 6-3

power ramp, 4-11
process setup, 4-13
programming sequence, 4-3
programming, detailed, 4-14

edit display setup, 4-23
edit sensor setup, 4-33
edit source setup, 4-36
edit utility setup, 4-38
program actions, 4-31
program inputs, 4-25
program outputs, 4-26
system setup, 4-23
view/edit material, 4-16
view/edit process, 4-14

rate deviation alarm, 4-13
rate establish, 4-12
rate ramp, 4-12
rate sample mode, 4-12

remote power handset, 1-5, 1-7, 2-2, 2-3,

3-4, 3-5, 5-7, 8-1, 8-3, 12-3

resuming a process from abort or halt, 4-

13, 5-2

RSH-600 example, 4-9
run time graph screens. See graph

displays

safety precaution, iv
sample program, 3-1
sensor crystal. See crystal
sensor setup, 4-7

position control, 4-8, 5-5

sign-on screen, 5-1
Simulate mode, 3-1, 3-4, 4-4, 4-39
source

abort key operation, 2-3, 5-6
control loop basics, 6-1
Edit Source Setup menu, 4-36
Edit System Setup Menu, 4-4
general description, 1-2
input/output characteristics, 7-1
manual key, manual operation, 2-2
manual operation, 3-4
messages

change pocket, 5-11
change source, 5-8
source fault, 5-8, 5-9

position control, 4-5, 5-5
programming

defining a material, 4-17
material setup, 4-11
pocket control, 4-5
pocket position feedback, 4-6
power ramps, 4-11
rate establish, 4-12
source shutter, 4-4
source voltage, 4-5

Source/Sensor Status screen, 5-4
specifications, I/O capability, 1-5
specifications, material parameter, 1-4
specifications, parameters, 1-6

special function key. See number 7 key
starting a new layer, 5-2
starting a new process, 4-13, 5-1