INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 154
MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE
11-16
Deposit Rate #2
2
52
1
0
...9999 0.1
Å/Sec
Deposit Rate #3
2
54
1
0
...9999 0.1
Å/Sec
Time
Setpoint
2 56 * 0...35999 Seconds
Ramp to Feed Time
2
58
*
0
...35999 Seconds
Feed
Power
2 60 1
0
...999 0.1%
Feed
Time
2 62 * 0...35999 Seconds
Ramp to Idle Time
2
64
*
0
...35999 Seconds
Idle
power
2 66 1
0
...999 0.1%
Maximum
Power
2 68 1
0...999
0.1%
Minimum
Power
2 70 1
0
...999
0.1%
Rate Deviation: Attn
2
72
1
0
...999 0.1%
Rate Deviation: Alarm
2
74
1
0
...999 0.1%
Rate Deviation: Abort
2
76
1
0
...999 0.1%
Sample Dwell Period
2
78
*
0
...35999 Seconds
Backup Tooling Factor
2
80
1
100
...4999 0.1%
Material Password
4
82
*
[4 ASCII Bytes]
ASCII
Total: 86 Data Bytes
* - Indicates decimal point position is not applicable.
Format/Example:
• To instruct the controller to send the parameters for Material #4, transmit:
Header
Interface
Address
Instruction
Code
Length
Material #N
(one byte)
Checksum
Dec
255 254
1
6 1 4
244
Hex
FF FE
01
06 1 04
F4
Response:
• In addition to the normal transmission receipt, the controller will respond
with:
Header
Interface
Address
Inst.
Code
Length
Material #N
(one byte)
86 Data Bytes
Checksum
Dec
255 254
1
6 87
4
(data) (checksum)
Hex
FF FE
01
06 57
04
(data) (checksum)
(data):
The 86 material parameter data bytes, as shown in the utility data table
above.
(checksum):
The checksum from the instruction code through the last data byte.