INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 157)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-19
Code #10: Send Process
Description: Instructs the controller to send all the process parameters for
Process #N to the host computer. A description of the process parameter list is as
follows:
Parameter Name Length (bytes) Dec. Pt. Position Range Units
Process name 12 * Characters None
Edit Password 4 * Characters None
View/Run Password 4 * Characters None
Number of Layers 1 * 0...250 None
Total: 21 Data Bytes
Following this general information about Process #N, one or more messages are
transmitted describing all of the layer data for the layers included in the process
are transmitted. Because the MDC-260’s message size is limited to 249 data
bytes, it may take up to five messages to transmit all of the layer data (depending
on how many layers are included in the process). Each message will contain
between one (1) and sixty (60) layers. For example, if the process contains the
maximum number of layers (250), the controller will send the layer data in five
messages. The first four messages will have 60 layers and the last message will
have 10 layers. The format of each layer messages is as follows:
Parameter Name Length (bytes) Dec. Pt. Position Range Units
Layer #N Thickness 3 3 0...999900 Å
Layer #N Material # 1 * 1...8 None
Total: 4 Data Bytes per Layer
Format/Example:
• To instruct the controller to send the parameters for Process #5, transmit:
Header Interface
Address
Instruction
Code
Length Process #N
(one byte) Checksum
Dec 255 254 1 10 1 5 239
Hex FF FE 01 0A 01 05 EF