INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 73)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-37
3 OPEN GND OPEN
4 OPEN GND GND
5 GND OPEN OPEN
6 GND OPEN GND
7 GND GND OPEN
8 GND GND GND
Table 4-1 Table of Input States for BCD Feedback Type
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when crystal one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired crystal is in position.
NO FEEDBACK - No crystal position feedback is used.
6. Rotator Delay (0 to 99 seconds)
This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section.), this parameter tells
the controller how long to wait assuming the crystal is in position. If position
feedback is provided, this parameter tells the controller how long it should wait
for the crystal to reach its target position before it issues a Sensor Fault message.
4.3.3.6 EDIT SOURCE SETUP
Selecting Edit Source Setup will present the Source Setup screen as shown in
Figure 4-18. In this screen you first select the source setup you wish to edit. To
select a source, use the Up-arrow and Down-arrow keys, then press the Right-
arrow or Enter key to select.
Figure 4-18 Source Setup Screen
Once selected, the source is configured with the following parameters located on
the right side of the display. Depending on the configuration, some of the
unnecessary parameters will be hidden:
1. Number of Pockets (1 to 16)
Source Setup Number of Pockets 04
Shutter Relay Type N.O.
Source #1 Shutter Delay (sec) 0.0
Source #2 Control Direct
Drive Up
Feedback Type Individual
Pocket Delay (sec) 10
Source Voltage 10V