INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 178
MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE
11-40
#
Value Description
Length
Format
Units
1 Power
4 String
%
2 Average
Thickness
5 String
KA
3 Average
Rate
4 String
Å/sec
4
Active Crystal Health
2
String
%
5 Layer
number
3 String
N/A
6 Rate
deviation
4 String
%
7
Active process number
1
String (1...10)
N/A
8
Active material number
1
String (1...8)
N/A
9
Active source number
1
String (1...2)
N/A
10
Sensor #1 Rate
4
String
Å/sec
11
Sensor #2 Rate
4
String
Å/sec
12
Sensor #1 Thickness
5
String
KÅ
13
Sensor #2 Thickness
5
String
KÅ
14
Sensor #1 Crystal Position
1
String (1...160)
N/A
15
Sensor #2 Crystal Position
1
String (1...160)
N/A
16
Sensor #1 Crystal Strength
4
String (0.0...99.9)
%
17
Sensor #2 Crystal Strength
4
String (0.0...99.9)
%
18
Source #1 Pocket Position
1
String (1...16)
N/A
19
Source #2 Pocket Position
1
String (1...16)
N/A
20
Layer Time To Go
7
String
h:mm:ss
21
State Time To Go
7
String
h:mm:ss
22
Elapsed Process Time
7
String
h:mm:ss
23
Elapsed Layer Time
7
String
h:mm:ss
24
Elapsed State Time
7
String
h:mm:ss
25
Source #1 Status
1
Bit 0: Shutter
Bit 1: Rotator Drv Up
Bit 2: Rotator Drv Down
N/A
26
Source #2 Status
1
Bit 0: Shutter
Bit 1: Rotator Drv Up
Bit 2: Rotator Drv Down
N/A
27
Sensor #1 Status
1
Bit 0: Shutter
Bit 1: Rotator Drv Up
Bit 2: Rotator Drv Down
Bit 3: Enabled
Bit 5: Failed
N/A
28
Sensor #2 Status
1
Bit 0: Shutter
Bit 1: Rotator Drv Up
Bit 2: Rotator Drv Down
Bit 3: Enabled
Bit 5: Failed
N/A