INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 55
MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP
4-19
φ
c = The angle of the crystal off of normal from the source.
φ
s = The angle of the substrate off of normal from the source.
This equation assumes the crystal face is perpendicular to the source.
Empirical calibration of the tooling factor is described in Section 10.5.2.
9. Proportional Gain (0 to 9999)
This parameter is the proportional gain factor for the source power control loop.
Control loop tuning is covered in Section 6.
10. Integral Time constant (0 to 99.9 sec)
This parameter is the system time constant. Control loop tuning is covered in
Section 6.
11. Derivative Time constant (0 to 99.9 sec)
This parameter is the system dead time. Control loop tuning is covered in Section
6.
12. Rise To Soak Time (0 to 9:59:59)
This parameter sets the time interval for the source power to ramp up from zero to
the power level set in Soak Power parameter. It should be long enough for the
material to have time to reach equilibrium temperature without spitting, or in the
case of evaporation sources, protected from unnecessary thermal shock.
13. Soak Power (0.0-99.9%)
This parameter defines the source power level during the Soak state. The Soak
Power should be established at a level which will assure that the source material is
properly outgassed and prepared for subsequent deposition.
14. Soak Time (0 to 9:59:59)
The Soak Time parameter defines the time duration of the Soak state. It is used in
conjunction with the Soak Power to allow the material to fully outgas.
15. Rise To Predeposit (0 to 9:59:59)
This parameter sets the time interval for the source power to ramp from Soak
Power level to the Predeposit Power.
16. Predeposit Power (0.0 to 99.9%)
This parameter defines the source power level during the Predeposit state. This
should be set as close as possible to the power level required to reach the desired
deposition rate. The Manual mode can be used to conveniently determine the
Soak and Predeposit power levels of a particular material.
17. Predeposit Time (0 to 9:59:59)
This parameter defines the time duration of the Predeposit state. The Predeposit
Time should be established at a value which allows the source material to be
brought to the deposit temperature level and stabilized in an orderly manner.
Since evaporation will normally occur at the Predeposit power level, too long a