INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 180)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-42
35 Attention 2 Errors 1 Bit 1 = Sensor Calibration Done
Bit 2 = Not Sampling (Sample Mode)
Bit 3 = Manual Crystal Change
Bit 4 = Resume Process
Bit 5 = Sound Attention
Bit 6 = Manual Pocket Change
Bit 7 = Pause on Layer Complete N/A
36 Controller Status 1 1 bit 0 = Ready Mode
bit 1 = Manual Mode
bit 2 = Time Power Mode
bit 3 = Hold Mode
bit 4 = Halt Mode
bit 5 = Abort Mode
bit 6 = Power Control Mode
bit 7 = In Process N/A
37 Controller Status 2 1 bit 0 = Resume Process
bit 1 = Simulate Mode
bit 5 = Material Time Setpoint
bit 6 = Backup Sensor Active
bit 7 = Last Layer Of Process
Total: 103 Data Bytes