INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 85)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-7
5.7.5 NOT SAMPLING
This mode indicates that the sensor crystal is shuttered from the source and that
the deposition rate is established using the last power level. Sampling mode is set
by two material parameters, Sample Dwell % and Sample Period. Refer to
Section 4.3.2.1 # 35 and # 36 for a description of Sample Mode.
5.7.6 PROCESS COMPLETE
This mode indicates that the selected process has run to completion. A Process
Complete message is displayed in the top right hand corner of the status display.
In addition, an attention warning will sound. The controller remains in this mode
until a reset signal puts it into the Process Ready mode.
5.7.7 MANUAL
This mode is indicated by the red LED behind the Manual key. In this mode the
control voltage output is controlled through the Remote Power Handset. For a
detailed description of this mode, refer to Section 3.6.
5.7.8 SIMULATE
This mode simulates rate and thickness build-up by simulating the sensor input
rather than the actual sensor. Refer to Section 3.5 for more information on the
Simulate Mode.
5.8 STATES
Figure 5-12 shows the different states that make up a complete deposition cycle,
such as Rise to Soak, Rise to Predeposit, etc. The controller moves from state to
state as the deposition progresses.
5.9 TROUBLE, ERROR AND WARNING MESSAGES
“Troubles” are controller conditions which in most case are indicative of
problems or errors, but may be just warnings. These messages are displayed in
the top right hand corner of the status screen (See Figure 5-3). When trouble
messages are displayed, the status banner at the top of the screen turns red.
In addition, there are three levels of audible warnings associated with the trouble
conditions, Attention, Alert and Alarm. * Sound will clear when the condition
clears.
Table 5-1 lists the messages and warning levels. The list is arranged in
descending order of priority. In the event that more than one warning level is
triggered, the higher level has priority. An asterisk (*) in the Clear column
indicates the warning sound will clear when the condition clears. Any key press
will also clear the sound. The action column indicates if any action is taken by
the controller as a result of the trouble.