Code #06: send a material, Code #06: send a material -15 – INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 153
MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-15
Code #06: Send a Material
Description:
Instructs the controller to send all the material parameters for
Material #N to the host computer. A description of the material parameter list is in
the table below: (Default values are in bold):
Parameter name
Length
(bytes)
Byte
Offset
Dec. Pt.
Pos
Values
(decimal)
Units
Material Name
10
0
*
[8 ASCII Bytes]
ASCII
Sensor
#
1 10 *
1
, 2
None
Crystal
#
1 11 * 1, 2, 3...16
None
Source
#
1 12 *
1
, 2
None
#
1 13 * 1, 2, 3...16
None
Rate Establish Time
1
14
*
0
, 1, 2...99
Seconds
Rate Start Thickness #1
1
15
1
0
...9999 0.1
Å/Sec
Rate Start Thickness #2
1
16
1
0
...9999
0.1 Å/Sec
Rate Stop Thickness #1
1
17
1
0
...9999
0.1 Å/Sec
Rate Stop Thickness #2
1
18
1
0
...9999
0.1 Å/Sec
Power Alarm Delay
1
19
*
0
... 99
Seconds
Sample Dwell %
1
20
*
0, 1, 2...100 %
Crystal Fail (Action)
1
21
*
0 = Switch
1 = TimePwr
2 = Halt
3 = Abort
None
Backup Sensor #
1
22
*
1
, 2
None
Backup Crystal #
1
23
*
1
, 2, 3...16
None
Density
2 24 2 80...100...9999 0.01
gm/cm³
Acoustic
Impedence
2 26 2
400...883...5999 0.01
gm/cm²/sec
Tooling
Factor
2 28 1
100...1000...4999 0.1%
Proportional
Gain
2 30 * 1...1000...9999 None
Integral
Time
2 32 1
0...999 0.1
Seconds
Derivative
Time
2 34 1
0
...999 0.1
Seconds
Rise to Soak Time
2
36
*
0
...35999 Seconds
Soak
Power
2 38 1
0
...999 0.1%
Soak
Time
2 40 * 0...35999 Seconds
Rise to Predeposit Time
2
42
*
0
...35999 Seconds
Predeposit
Power
2 44 1
0
...999 0.1%
Predeposit
Time
2 46 * 0...35999 Seconds
Rate Establish Error
2
48
1
0
...999 0.1%
Deposit Rate #1
2
50
1
0
...9999 0.1
Å/Sec