INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 176)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-38
Alert Errors
1 Bit 3 = Sound Alert Action
Bit 4 = Minimum Power Alert
Bit 5 = Maximum Power Alert
Bit 6 = Rate Deviation Alert
Bit 7 = Crystal Marginal&Deposit
Attention 1 Errors 1 Bit 0 = Process Complete
Bit 1 = Minimum Power Attention
Bit 2 = Maximum Power Attention
Bit 3 = Rate Deviation Attention
Bit 4 = Crystal Marginal&!In Process
Bit 5 = Crystal Fail&! In Process
Bit 6 = Crystal Marginal&In Process,
Switch
Bit 7 = Crystal Fail&In Process, Switch
Attention 2 Errors 1 Bit 1 = Sensor Calibration Done
Bit 2 = Not Sampling (Sample Mode)
Bit 3 = Manual Crystal Change
Bit 4 = Resume Process
Bit 5 = Sound Attention
Bit 6 = Manual Pocket Change
Bit 7 = Pause on Layer Complete
Discrete Input Register 1 1 Bit 0 = Input #1, ...8 (0=False, 1=True)
Discrete Output Register 1 1 Bit 0 = Output #1, ...8 (0=False, 1=True)
Controller Status 1 1 bit 0 = Ready Mode
bit 1 = Manual Mode
bit 2 = Time Power Mode
bit 3 = Hold Mode
bit 4 = Halt Mode
bit 5 = Abort Mode
bit 6 = Power Control Mode
bit 7 = In Process
Controller Status 2 1 bit 0 = Resume Process
bit 1 = Simulate Mode
bit 5 = Material Time Setpoint
bit 6 = Backup Sensor Active
bit 7 = Last Layer Of Process
Source #1-2 Pocket Position 1x2 (1-16)
Source #1-2 Power 2x2 (0-4000), Power=99.9%*N/4000
Sensor #1-2 Crystal Position 1x2 (1-16)
Sensor #1-2 Crystal Health 2x2 (0.0-99.9)%
Total: 24 Data Bytes