INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 19)

MDC-260 DEPOSITION CONTROLLER
GENERAL DESCRIPTION 1-1
1. GENERAL DESCRIPTION
1.1 PURPOSE
The MDC-260 is a full-featured deposition controller which can provide
automatic control of single or multi-layer film deposition in either a production or
development environment. The MDC-260 will improve predictability and
repeatability of deposited film characteristics through dependable digital control.
The MDC-260 makes programming and operation easy with an easy to use menu-
driven user interface and a large graphic LCD for displaying important run-time
information and graphs. The plain-English programming interface offers
unmatched simplicity and control of all processes, materials, inputs, outputs and
actions.
1.2 FEATURES
The MDC-260 incorporates numerous features which are economically justifiable
as a result of rapid advances in semiconductor technology and the advent of low
cost microprocessors.
1.2.1 AMPLE PROGRAM STORAGE
The MDC-260 is capable of storing up to 10 processes, 250 layer definitions and
8 complete material definitions. Once a program is entered it will be maintained
in internal Flash Memory indefinitely (for a minimum of 100 years) without
external power.
1.2.2 DYNAMIC MEASUREMENT UPDATE RATE
Measurement is dynamically adjusted from 0.5 to 10 Hz for optimum resolution
and control.
1.2.3 SUPERIOR COLOR GRAPHICS DISPLAY
The MDC-260 features a 240x64 pixel color LCD graphics display allowing real-
time graphing of important process information such as rate, rate deviation,
thickness and power.
1.2.4 PROGRAM SECURITY
To assure the integrity of stored programs, the MDC-260 incorporates view/edit
passwords to guard against unauthorized program changes.
1.2.5 DESIGNED FOR UNATTENDED OPERATION
The MDC-260 has been designed for truly automatic operation and toward this
end incorporates extensive internal monitoring and overriding abort circuitry to
minimize the possibility of damage in the event of a failure or other problem in
the total deposition system. In addition there are attention, alert and alarm signals
with adjustable volume for trouble and routine operator call.