Ocean Optics NanoCalc - Manual (Page 9)

Ocean Optics Germany GmbH Thin Film Metrology
8
From now on there is no need to repeat this reference measurement unless you like to control
repeatability
BUT: from now on you should not change the lamp intensity or the distance to your sample. Your
sample should also have the same height as the reference sample.
4. Put your wafer with the thin film onto the stage and press the button „measure“. Pay attention not to
have dust particles in the region where you measure.
You should get a spectrum like this (with a different numbers of extrema or even no extrema).
5.
Then press the button „EditStructure“ and choose the correct parameters for your layer setup:
It is not important to choose perfect values for thickness and estimation limits at the moment.
number of layers = 1
catalogue for substrate= semiconductors
catalogue for layer 1 = oxides
material for substrate = Si(100)
material for layer 1 = SiO2_(therm)
estimated thickness = 50 nm
user limits