Ocean Optics NanoCalc - Manual (Page 80)

Ocean Optics Germany GmbH Thin Film Metrology
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The two curves from measure and analyze should be nearly the same. How good they fit can you see in the
right lower corner as Quality of Fit. The difference in amplitude comes from the “wrong” reference BK7
instead of Borosilicate 40 and the inexact values for the n(lambda) and k(lambda) from glass and layer. This
does not effect the thickness value in this case.
Please try different points on the wafer. Activate continuous mode and analyze, and move the wafer by
tweezers.
Save these settings as a recipe in menu “File” and “Save as recipe” under the name Nb2O5_Boro40.lrc”.